Essential Basics Of Thin Film Deposition Control By Quartz Crystal Monitoring
Thin Film Deposition is a vacuum technology for applying coatings of pure materials to the surface of various objects. The coatings, also called films, are usually in the thickness range of angstroms to microns and can be a single material, or can be multiple materials in a layered structure. This paper discusses the basic principles of thickness and rate control by employ of quartz crystal monitoring
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